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发明名称
IMMERSION ETCHING SOLUTION FOR COPPER AND COPPER ALLOY MATERIAL
摘要
申请公布号
JPH0718472(A)
申请公布日期
1995.01.20
申请号
JP19930191618
申请日期
1993.07.06
申请人
EBARA YUUJIRAITO KK
发明人
YAMAMOTO KANICHIROU
分类号
C23F1/18;H01L21/308;(IPC1-7):C23F1/18
主分类号
C23F1/18
代理机构
代理人
主权项
地址
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