Verfahren zur Behandlung von Abgasen, die ClF3 enthalten.,申请号DE19916002294T-传众专利搜索

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发明名称	Verfahren zur Behandlung von Abgasen, die ClF3 enthalten.
摘要
申请公布号	DE69102294(T2)	申请公布日期	1995.01.19
申请号	DE19916002294T	申请日期	1991.01.30
申请人	EBARA CORP., TOKIO/TOKYO, JP;EBARA RESEARCH CO., LTD., FUJISAWA, KANAGAWA, JP	发明人	MORI, YOICHI, FUJISAWA-SHI, KANAGAWA-KEN, JP
分类号	B01D53/68;(IPC1-7):B01D53/34;B01D53/14	主分类号	B01D53/68
代理机构		代理人
主权项
地址

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