Photoelectric device for measuring length or angle

摘要

A device according to the invention for measuring length or angle has a sampling plate (5) in which a plurality of photosensitive surface regions (8) are formed in a semiconductor substrate (7). The width (B) of these surface regions (8) is equal to a multiple of the spacing period (T2) of the sampling grating (9) which is applied onto these surface regions (8). In order to avoid crosstalk, the individual surface regions (8) are arranged at a mutual separation (A) which is also equal to a multiple of the spacing period (T2) (Figure 1). <IMAGE>