摘要 |
For the automatic ordering of a variable numer of batches into a lot which can be handled with high efficiency in a production line for semiconductor chips, use is made, between a preceding and a following process, of an apparatus which changes the number of batches combined to form a lot if such a change is necessary. The apparatus is made up of a bearing arrangement with a multiplicity of bearing devices which are arranged in a straight row and in which in each case a multiplicity of batches can be recieved, of a first transfer robot which is provided on one side of the bearing arrangement and is intended for introducing the batches into the bearing devices and removing them therefrom, of a second transfer robot which is provided on the other side of the bearing arrangement and is intended for introducing the batches into the bearing devices, on the rear side thereof, and removing them therefrom, of a station for depositing a multiplicity of batches handled by the first and the second robots, of a batch-detection device for reading identification information on the batches deposited at the station, of the third transfer robot for transferring the batches, deposited at the station, by way of the first and the second robots, and of a control unit which automatically controls the bearing devices, the station, the first, the second and the third transfer robots in a coordinated manner such that the batches deposited at the station... corresponding to the... Original abstract incomplete.
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申请人 |
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP |
发明人 |
WATANABE, HIROSHI, ITAMI, HYOGO, JP;HASEGAWA, HIROAKI, ITAMI, HYOGO, JP |