LIGHT-ABSORBING POLYMER, METHOD FOR SYNTHESIZING THE SAME, AND FILM-FORMING COMPOSITION AND ANTIREFLECTION FILM PREPARED USING SAID POLYMER

摘要

A light-absorbing polymer comprising an organic chromophore reaction-bonded through a methylene or alkylene group to the carboxyl groups of a copolymer comprising repeating units having a dicarboxylic acid or carboxylic anhydride group on its backbone. In the light-absorbing polymer, the remaining carboxyl groups may be amidated and/or imidated with an aromatic compound having a reactive amino group. An antireflection film which is insoluble in a resist solvent and has good step coverage can be prepared from the light-absorbing polymer by dissolving the same, optionally together with an aromatic compound having a reactive amino group for improving properties, in the same solvent as the resist solvent, coating a substrate with the solution, and baking the coating. Coating of the antireflection film with a photoresist followed by irradiation with a radiation, such as a far-ultraviolet radiation, can provide a high-resolution resist image which is not affected by a standing wave in the preparation of an integrated circuit device.