发明名称 |
Wire bonder and wire bonding method. |
摘要 |
<p>The present invention provides an apparatus and its method that is able to effectively use positional data such as coordinates and so forth stored in advance in a bonder. This wire bonder is able to compare and evaluate at least one set of image data of either a first bonding point or second bonding point in the form of bonded sites, or a wire spread between said first and second bonding points, with the positional data into which said image data has been incorporated in advance, and automatically perform inspection and make corrections. <IMAGE></p> |
申请公布号 |
EP0634791(A2) |
申请公布日期 |
1995.01.18 |
申请号 |
EP19940111051 |
申请日期 |
1994.07.15 |
申请人 |
KAIJO CORPORATION |
发明人 |
NISHIMAKI,KIMIJI;KAMIHARAKO,TAKASHI |
分类号 |
H01L21/00;H01L21/607;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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