| 摘要 |
<p>The disclosure relates to a variable speed robot (80) located adjacent to a plurality of stations (26 to 32), including a wafer support assembly (84) capable of holding a wafer (36) and adapted to move between the staions sometimes holding a wafer and sometimes not holding a wafer. The wafer support is connected to a driver (102,104) which rotates the support about a rotational axis and causes the support to reciprocate between a retracted position and an extended position. The robot also includes a controller (78) that operates the driver at a first speed when the wafer support assembly holds a wafer and at a second speed when the wafer support assembly is not holding a wafer. <IMAGE> <IMAGE></p> |
