发明名称 FLUID FLOW CONTROLLER
摘要 A fluid flow controller comprising a flow passage which is opened and closed by the flexing of a diaphragm secured at its periphery characterised in that the diaphragm is a laminate of a plurality of metal diaphragms and in that friction reducing material is provided between the diaphragms.
申请公布号 CA2065589(C) 申请公布日期 1995.01.17
申请号 CA19922065589 申请日期 1992.04.08
申请人 KIYOHARA, MASAKO 发明人 NISHIMURA, RYUTARO;YAMAJI, MICHIO;MAEDA, HIROKATSU;IKEDA, NOBUKAZU;YAMAMOTO, KENJI
分类号 F16K7/12;F16K7/14;(IPC1-7):F16K31/126 主分类号 F16K7/12
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