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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND WIRING
摘要
申请公布号
JPH0714834(A)
申请公布日期
1995.01.17
申请号
JP19930145879
申请日期
1993.06.17
申请人
HITACHI LTD
发明人
OKAWA AKIRA;FUJII YUJI
分类号
H01L21/28;H01L21/3205;H01L29/43;(IPC1-7):H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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