| 摘要 |
An apparatus for preventing the self-excited vibration of a static pressure bearing device includes a movable bed and a porous pad. The movable bed is noncontactly supported by the static pressure of pressurized fluid spouted from the porous pad toward the surface of a fixed bed. The porous pad is designed such that the natural frequency of a vibration system including the movable bed is regulated so that among the fluctuation components of the static pressure when the dimension of a bearing gap varies periodically, a periodic fluctuation component having a phase delay of 90 DEG relative to a decrease in the dimension of the bearing gap may be positive and of a frequency equal to the aforementioned natural frequency.
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