| 摘要 |
In a wafer transfer device for transferring wafers from a first basket to a second basket, a carriage carries a lifting member which is vertically slidably supported by a carriage main body, and a plurality of wafer support plates are carried by the lifting member. As the wafer support tables carried by the carriage move through the second basket and enters the first carriage, the lifting member is lifted by a cam slot engaging with a cam follower provided in the lifting member so as to lift the wafers received in the first basket clear from their supporting surfaces supporting their side edges. The carriage is then reversed, and when the wafer support plates are placed into the second basket, the cam slot causes the lifting member to be lowered so as to rest the side edges of the wafers the corresponding supporting surfaces. By providing two different paths in the cam slot and switching the cam follower in an appropriate manner, it is also possible to transfer wafers from the second basket to the first basket. The device is so simple that it can be made of material free from emission of contaminants, and the fabrication cost can be minimized.
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