发明名称 |
MANUFACTURE OF CIRCUIT ELEMENT BY PHOTOLITHOGRAPHY, THERMOSTATIC POLYIMIDE FILM, MIXED POLYIMIDE AND SEMICONDUCTOR DEVICE |
摘要 |
<p>PURPOSE: To provide in a simple manner a polyimide composition, which absorbs irradiation in a rage of 400-450 nm and is stable above a specific temperature, an anti-reflection dielectric layer which is stable even at a high temperature, and a semiconductor device having the dielectric layer. CONSTITUTION: An IC is manufactured by photolithography, including such process, wherein a antireflection polyimide or polyimide precursor layer having at least one chromophore which is obtained from perylene and naphthalene, etc., while having sufficient absorption for attenuating irradiation at 405 or 436 nm is adhered on a base body, and then heated at 200-500 deg.C.</p> |
申请公布号 |
JPH0714762(A) |
申请公布日期 |
1995.01.17 |
申请号 |
JP19940050106 |
申请日期 |
1994.03.22 |
申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
DENISU FURIIGOA HOOGAN;HARORUDO JIYOOJI RINDE;RONARUDO AACHIYAA WAREN |
分类号 |
C08G73/10;C08K5/3437;C08L77/00;C08L79/08;G03F7/09;G03F7/11;H01L21/027;(IPC1-7):H01L21/027;C08K5/343 |
主分类号 |
C08G73/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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