发明名称 |
Design verification device |
摘要 |
A design verification device includes a diagram data memory for storing designed diagram data, a design reference value memory for storing a design reference value, a determination circuit for making determination with different weight between intersecting directions of a diagram to either the distance or the design reference value in calculating the distance between diagram data provided from the diagram data memory means for making determination whether the calculated distance follows the design reference value; and an error signal output circuit for providing an error signal when determination is made that the design reference value is not followed by the determination circuit.
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申请公布号 |
US5383132(A) |
申请公布日期 |
1995.01.17 |
申请号 |
US19920894663 |
申请日期 |
1992.06.05 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
SHINOHARA, HIROFUMI;TSUJIHASHI, YOSHIKI;MATSUMOTO, HISASHI |
分类号 |
G01N21/88;G01N21/93;G01N21/956;G06F17/50;H01L21/66;H01L21/82;(IPC1-7):G06F15/60;G06F15/40 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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