| 摘要 |
PURPOSE:To concurrently measure a reflected high-speed electron beam diffraction image with luminescence light by applying the constitution where the incident angle of an electron beam incident on sample surface becomes equal to or not more than the prescribed value. CONSTITUTION:A sample 4 is fixed to a sample holder 2 having a rotary and flap mechanism in a vacuum vessel 1. An electron beam 8 emitted from an electron gun 6 is incident on the surface of the sample 4 at an angle nearly in parallel thereto (10 degrees or less). The electron beam 8 is diffracted on the surface and a diffracted electron beam 8' reaches a phosphor screen 20. This screen 20 is thereby made luminous. As a result, reflected high-speed electron beam diffraction measurement can be undertaken about polar surface. Also, luminescence light 10 is emitted from the sample 4. This light 10 is converged through a lens system 12a and reflected with a total reflection mirror 12b. The light 10, then, passes a quartz glass window 14 and is taken out of the vessel 1. A spectrograph 16 and photo detector 18 are arranged outside the vessel 1 to spectroscopically measure the introduced light 10. In this case, a light shielding plate 13 is fitted, so as to prevent the light of the screen 20 from being incident on the lens system 12a. |
