发明名称 MANUFACTURE OF ELECTRONIC DEVICE
摘要 <p>PURPOSE: To provide narrow stripes separated by a shorter distance and/or another arrays which are used in various positions in the lengthwise directions of narrow stripes and form a discharge route for ion injection process without requiring any unnecessary processing step. CONSTITUTION: At the time of production of a liquid crystal display device ice having a driving circuit and another large-area electronic device, other parts of narrow stripes 9 and thin film patterns 12 form transistors 15, and narrow stripes 9 can be damaged by discharge in the ion injection process. This damage provides a discharge route 10 requiring no unnecessary processing processes, and this discharge route 10 can be held in a produced device. This discharge route has a series of discharge gaps 20 in the lengthwise direction, and then, successive thin film areas 10 and 9 of the discharge route are separated and electric insulation for normal operation of the device is formed. However, electric charge is leaked in discharge gaps between separated successive areas 10 and 9 of the discharge route during ion injection, and controlled discharge is continuously obtained from the thin film patterns 12.</p>
申请公布号 JPH0713201(A) 申请公布日期 1995.01.17
申请号 JP19930310371 申请日期 1993.12.10
申请人 PHILIPS ELECTRON NV 发明人 JIEFURII ARAN CHIYATSUPUMAN
分类号 G02F1/136;G02F1/1362;G02F1/1368;H01L21/265;H01L21/3215;H01L21/77;H01L21/84;H01L29/78;H01L29/786;(IPC1-7):G02F1/136 主分类号 G02F1/136
代理机构 代理人
主权项
地址