CLEANING APPARATUS USING JET NOZZLE,申请号KR19950017162-传众专利搜索

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发明名称	CLEANING APPARATUS USING JET NOZZLE
摘要
申请公布号	KR0161865(B1)	申请公布日期	1999.02.01
申请号	KR19950017162	申请日期	1995.06.23
申请人	HYUNDAI MICRO ELECTRONICS CO., LTD.	发明人	KIM, JAE-JUNG;HUH, YUN-JUN;HAN, SUK-BIN
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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