| 摘要 |
PURPOSE:To improve the operational efficiency while avoiding the repollution of cleaned glass substrates. CONSTITUTION:The glass substrate cleaning device is provided with means 9 for inspecting the surface of glass substrates P to be delivered in horizontal state, means for cleaning the glass substrates P to be delivered in vertical state, and means for carrying for delivering the glass substrates at least between the surface inspecting means 9 and the cleaning means. At this time, the cleaning means 5-8 respectively having holding parts 17-20 vertically holding the glass substrates delivered in the vertical state capable of being controlled thereby enabling the glass substrates to be parallel-processed. Furthermore, the glass substrate carrier means 1, 2 in the glass substrate cleaning device holding the ends of the glass substrates P can freely control the attitudes of the glass substrates P held intact from almost horizontal to vertical state. |
