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发明名称
SEMICONDUCTOR PRODUCTION DEVICE
摘要
申请公布号
JPH0714769(A)
申请公布日期
1995.01.17
申请号
JP19930150729
申请日期
1993.06.22
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
KOGA KAZUHIRO;SASABE SHUNJI
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
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地址
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