| 摘要 |
PURPOSE:To correct the irregularity of analysis results for the start and end portions of analysis zones by storing the result of an initial analysis, and multiplying the result by a correction factor for connection to an analysis result regarding a zone where only the second analysis is undertaken. CONSTITUTION:Regarding the analysis zone of sample surface, the zone of a positional coordinate data from (0, 0) to (X, Y1) shows an initial (trial) analysis zone. When an initial analysis result along scanning lines (x) and (y1) and the second analysis result along scanning lines (x) and (y2) adjacent thereto are considered, the second analysis result is along the first scanning line of the virgin region for the second analysis. Also, the concentration of an object element may be regarded as the same as a portion along the lines (x) and (y1). Consequently, a ratio of coordinate data on the same (x) ordinate regarding the lines (x, y1) and (x, y2) becomes a factor for converting the initial analysis data to an analysis result under the second analysis condition. When the initial analysis data from the coordinates (0, 0) to (x, y1) is multiplied by the conversion factor, an analysis result for the initial analysis zone can be provided under the second analysis condition. |
