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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH0714826(A)
申请公布日期
1995.01.17
申请号
JP19940015746
申请日期
1994.01.17
申请人
TOSHIBA CORP
发明人
OKANO HARUO;SEKINE MAKOTO;NOGUCHI SADAHISA
分类号
H01L21/205;H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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