PRODUCTION OF SUPERFINE PARTICLE

摘要

PURPOSE:To provide a method for easily and efficiently producing and collecting superfine particles wherein unevenness of distribution of particle diameter is small by increasing the nonlinear effect of the superfine particles. CONSTITUTION:Material 2 becoming the raw material of superfine particles is irradiated and heated with laser beams 4 in a vacuum vessel 1 into which inert gas has been introduced. A part of movement of the generated vapor or superfine particles formed from the generated vapor is disturbed by a shielding body 3. Superfine particles are collected by disposing a base plate 5 in such a position in the vacuum vessel 1 that the vapor or the superfine particles traveling straight are not reached.