Plasma-supported, chemical vacuum-coating installation

摘要

A plasma chamber (4) is arranged, coaxially to a vacuum pump connection (2, 3), in a vacuum container (1). This plasma chamber has a screen (5) which forms an envelope surface and into which an end wall (6, 7) can be moved from the direction of the two end faces, which end wall has a central process-gas inlet (8, 9). Between the end walls (6, 7), there is arranged a substrate holder (12) which simultaneously forms an electrode (10). <IMAGE>