发明名称 |
Position measuring device |
摘要 |
In accordance with Figure 4, scale (1) of a position measuring device is designed in such a way that its thermal expansion coefficient corresponds to the expansion coefficient of the material which is being cut on a machine for which the relative position of the machine and component is being measured by the position measuring device. <IMAGE>
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申请公布号 |
DE4320728(A1) |
申请公布日期 |
1995.01.12 |
申请号 |
DE19934320728 |
申请日期 |
1993.06.23 |
申请人 |
DR. JOHANNES HEIDENHAIN GMBH, 83301 TRAUNREUT, DE |
发明人 |
NELLE, GUENTHER, DR.-ING., 83346 BERGEN, DE |
分类号 |
G01B21/00;G01B5/00;G01D5/245;G01D5/347;(IPC1-7):G01B21/00;G01D3/028;G01B3/02;H01L21/68 |
主分类号 |
G01B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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