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发明名称
Donor doped perovskites for thin film dielectrics
摘要
申请公布号
EP0571948(B1)
申请公布日期
2000.02.09
申请号
EP19930108423
申请日期
1993.05.25
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
SUMMERFELT, SCOTT R.;KULWICKI, BERNARD M.;BERTATAN, HOWARD R.
分类号
C30B31/00;H01G4/12;H01L21/316;H01L21/822;H01L27/04;H01L27/115;(IPC1-7):H01G4/12
主分类号
C30B31/00
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代理人
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