发明名称 |
ENHANCED IMAGING MODE FOR TRANSMISSION ELECTRON MICROSCOPY |
摘要 |
In the magnetic optical system of a transmission electron microscope (TEM), the increased strength of a second objective lens (14) is used to increase the longitudinal energy dispersion by forming an image at a magnified second back-focal plane. The electric current distribution of other lenses (6, 18) in the microscope is reconfigured to compensate for any offsets introduced by the modified second objective lens (14). A plurality of deflectors (16) are installed which enable the manipulation of the electron beam electronically between the specimen and the second back-focal plane. The magnified second back-focal plane is projected onto the selected-area aperture (12), allowing the use of the existing selected-area aperture (12) as an objective aperture to achieve an energy filtering effect which improves the image contrast and resolution.
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申请公布号 |
WO9501647(A1) |
申请公布日期 |
1995.01.12 |
申请号 |
WO1994US07567 |
申请日期 |
1994.07.01 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;JOEL LIMITED |
发明人 |
ELLISMAN, MARK, H.;FAN, GARY, G., Y.;PRICE, JEFF;SUZUKI, SEIICHI |
分类号 |
H01J37/26;(IPC1-7):H01J37/26 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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