Methode zur Erzeugung einer isolierten Schicht.,申请号DE19906014421-传众专利搜索

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发明名称	Methode zur Erzeugung einer isolierten Schicht.
摘要
申请公布号	DE69014421(D1)	申请公布日期	1995.01.12
申请号	DE19906014421	申请日期	1990.05.07
申请人	OKI ELECTRIC INDUSTRY CO., LTD., TOKIO/TOKYO, JP	发明人	FUKUDA, HISASHI, C/O OKI ELECTRIC IND. CO.,LTD., MINATO-KU, TOKYO, JP
分类号	H01L21/31;H01L21/306;H01L21/3105;H01L21/316;(IPC1-7):H01L21/316;H01L21/311;C23C8/00	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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