| 摘要 |
PROBLEM TO BE SOLVED: To enable a processing device to be lessened in size and scaled up in development contents, by a method wherein the space scale of electron's motion in a plasma generating region is enlarged A times, and a time scale is reduced to 1/B when a plasma processing device is similarly enlarged A times in scale, and the motion state of electron is controlled based on the product of a space scale multiplied by a time scale. SOLUTION: It is required that a gas pressure in a plasma generating region is set so as to be reduced to 1/A. This low pressure of gas is attained by controlling a space pressure with a vacuum pump connected to an exhaust means 18. When a law of similarity is applied, it is preferable that electrons in a plasma generating region are enhanced in incident energy. Therefore, an electron acceleration potential difference between a blocking/transmitting mechanism 13 and a plate electrode 10 is enlarged A times. In this case, the state of a motion r(t) of an electron is controlled so as to be a motion A.r(t/B) taking advantage of a position vector r( t) as a function of a time t. By this setup, a plasma processing device enlarged A times in scale is capable of having the same plasma state as a plasma processing device of original scale.
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