发明名称 |
Force sensor, temperature sensor and temperature/force sensor device. |
摘要 |
<p>A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting electrons in accordance with an applied potential; an electron absorption unit having an anode for capturing electrons emitted from the cathode, the electron emission unit and the electron absorption unit being formed on a surface of the substrate; and a control unit for, on the basis of the displacement of the movable unit, controlling the electron capturing efficiency of the anode with respect to electrons emitted from the cathode. <IMAGE></p> |
申请公布号 |
EP0598343(A3) |
申请公布日期 |
1995.01.11 |
申请号 |
EP19930118292 |
申请日期 |
1993.11.11 |
申请人 |
FUJI ELECTRIC CO LTD |
发明人 |
AMANO AKIRA C O FUJI ELECTRIC;MATSUZAKI KAZUO C O FUJI ELECT;SAKAI TOSHIAKI C O FUJI ELECTR |
分类号 |
G01K5/28;G01D5/48;G01L1/00;G01L1/18;G01L9/00;G01L11/00;G01P15/08;(IPC1-7):G01L1/00 |
主分类号 |
G01K5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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