SURFACE FINISHING METHOD FOR MAGNETIC DISK SUBSTRATE AND ITS DEVICE

摘要

PURPOSE:To obviate the degradation in smoothing effect, to enable long-term grinding and to improve productivity by rapidly and repetitively executing supply and discharge of an abrasive liquid intruding between the recesses of a grinding tool and a magnetic disk substrate to a grinding surface. CONSTITUTION:The magnetic disk substrate 11 having microprojections 15 is subjected to surface grinding, by which these microprojections 15 are removed and the smooth surface is obtd. This surface finishing device is provided with a grinding tool 13 which forms an outside shape having plural pieces of ruggedness by connecting plural spherical members 13a to a rosary shape and has the length approximately equal to the length extending to the grinding region in the radial direction of the magnetic disk substrate 11. The projecting parts of this ground tool 13 are pressed to the rotating magnetic disk substrate 11 and is moved back and forth at about one pitch of the ruggedness described above in a radial direction and the substrate is ground while the abrasive liquid is supplied thereto.