| 摘要 |
PURPOSE: To provide a reluctance element on the surface which is accurately defined about its flatness and structure. CONSTITUTION: A 1st isolation layer 5 of non-magnetic materials is formed on a supporting plane 3a, and on the isolation layer 5, a soft magnetic layer 17 with its top plane on a far side from the isolation layer 5 is formed by attaching soft magnetic materials. Magnetic flux guide elements 17A and 17B and an opening between the elements 17A and 17B are formed by removing a part of the layer 17 and then a 2nd isolation layer 18 is formed by attaching soft magnetic materials on the elements 17A and 17B and in the opening. The isolation layer 18 has the thickness whose minimum distance between the supporting plane 3a and the top plane of the isolation layer 18 is longer than the maximum distance between the plane 3a and the top plane of the magnetic layer 17 when viewed perpendicularly to the plane 3a. Then, a main surface 19 is formed by being mechanically and chemically ground, and a reluctance element 23 is formed by attaching reluctance materials there. |
