| 摘要 |
PURPOSE: To provide an integrated type accelerometer having good directivity, reproducibility and sensitivity in which conductors for connecting electrodes to electrodes are never mutually crossed. CONSTITUTION: A movable mass body 2 mechanically connected to a conductive base 8 by a flexible beam has a movable conductive tooth line 12, and fixed conductive tooth lines 18, 15 are insultingly connected to the base 8 so as to be alternately geared with them. A fixed electrode 22 functioning as an electrostatic shielding body is arranged between the fixed too the line 18 and the movable tooth line 12 so that each movable tooth is inserted between the fixed electrode 22 and the fixed tooth to form a variable capacitance capacitor. |
