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发明名称
ATOMIC FORCE MICROSCOPE
摘要
申请公布号
JPH075181(A)
申请公布日期
1995.01.10
申请号
JP19930168325
申请日期
1993.06.16
申请人
CANON INC
发明人
MATSUDA HIROSHI;MORIKAWA YUUKO;TAKEDA TOSHIHIKO
分类号
G01B21/30;G01N37/00;G01Q20/02;G01Q60/24;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
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