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发明名称
MICROWAVE PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH076895(A)
申请公布日期
1995.01.10
申请号
JP19930317712
申请日期
1993.12.17
申请人
HITACHI LTD;KASADO KIKAI KOGYO KK
发明人
SAIKAI MASAHARU;TANAKA YOSHIE
分类号
H05H1/46;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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