| 摘要 |
<p>PURPOSE: To provide a reliable pressure regulating device quickly manufacturable in which both material cost and labor cost are reduced. CONSTITUTION: A diaphragm 80, which is of single rolling type, is made of polyimide. A sensor bush 76 is arranged on the opposite side of the diaphragm 80, seen from a spring button 82, and the sensor bush 76 has a circular disc 84 and a substantially cylindrical extended part 85 arranged in the center. The bush 76 is held by a disc plate 88. The disc plate 88 is also made of LCP resin, and has an annular projection 90 formed on the circumference of the disc plate 88 arranged so as to sandwich the outside edge part 91 of the disc plate 88 with the shoulder part 66 of a cup 40. The diaphragm 80 is adhered to the shoulder 66 by use of solvent washing and plasma etching. The disc plate is inserted, and the outside edge part 96 of the projection 90 is adhered to the step 68 of the cup 40 by use of ultrasonic welding. In order to harden the adhesive, hardening in furnace is performed.</p> |
