| 摘要 |
PURPOSE:To enable the formation of a stepped plane having step parts and smooth surfaces by ion milling by setting the particle size of a component which is low in milling speed smaller than the particle size of a component which is high in milling speed. CONSTITUTION:Plural magnetic head elements are formed in a matrix form on a ceramic wafer formed of plural components varying in the milling speed. The wafer is then cut to a bar lined with these elements in one row. Rail parts 10 and 11 are formed by chemical or physical processing and these rail surfaces are ground. The bar is then spin coated with a photoresist material and is patterned, by which the stepped plane parts 13, 14, 15, 16 are removed and a mask opened in these parts alone is formed. The mask is subjected to ion milling by vertical beams and thereafter, the photoresist layer is removed and is cut to a slider. The particle size of the low milling speed is set smaller than the particle size of the high milling speed at this time, by which the milling speeds of both components are substantially equalized. |
