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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH076964(A)
申请公布日期
1995.01.10
申请号
JP19930167517
申请日期
1993.06.14
申请人
SONY CORP
发明人
KOMATSU JUN
分类号
C30B25/14;H01L21/205;H01L21/223;(IPC1-7):H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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