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发明名称
PRODUCTION OF ZONE PLATE
摘要
申请公布号
JPH075299(A)
申请公布日期
1995.01.10
申请号
JP19930144072
申请日期
1993.06.15
申请人
NIKON CORP
发明人
KATAKURA NORIHIRO;NAKAYAMA SHIGERU
分类号
G21K1/06;(IPC1-7):G21K1/06
主分类号
G21K1/06
代理机构
代理人
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