| 摘要 |
PURPOSE:To perform impedance matching readily by providing a capacitor circuit, which can adjust the capacitance, between a dielectric electrode and an impedance matching circuit. CONSTITUTION:An impedance matching device 2 is constituted of an inverted-L- type LC resonating circuit, and the impedance of a high-frequency power supply circuit 1 and the impedance of a load are matched. A variable capacitor circuit 6 is provided between the impedance matching device 2 and a discharging electrode 4 provided in a laser head 3. A capacitance, which is sufficiently larger than the capacitance of the discharging electrode 4 that is a load, is provided, and the capacitance can be adjusted. The load impedance observed from the high-frequency power supply circuit is formed unequivocally only by adjusting the capacitance of the variable capacitor. Therefore, the load impedance observed from the high-frequency power supply circuit 1 can be made constant by only adjsuting the capacitance of the variable capacitor circuit. Thus, the impedance of the high-frequency power supply circuit 1 and the load impedance can be readily matched. |
