发明名称 PREPARATION OF RELIEF STRUCTURE BY I-RAY IRRADIATION
摘要 PURPOSE: To provide a heat resistant and chemical resistant relief structural body having specially high transparency in i rays and high photosensitivity at 200∼600nm and suitable for producing a polyimide protective lacquer in the electronics field. CONSTITUTION: A photopolymerizable composition consisting of a polyimide precursor containing repetitive units shown in the formula and a photoinitiator is applied on a base material, exposed with i-ray in an image pattern, and then unexposed parts are removed and conditioning is performed to the result. In the formula, as examples of groups, X is a tetravalent group of oxydiphthalic acid, Y is a divalent group of an aromatic diamine, A is -COO-, and R1 is CH2 = CH(CH3 )COOC2 H4 -.
申请公布号 JPH075688(A) 申请公布日期 1995.01.10
申请号 JP19940124383 申请日期 1994.05.13
申请人 CIBA GEIGY AG;O C G MIKUROEREKUTORONIKUSU INC 发明人 DEIITOMAA HIYUUGURIN;OTSUTOMAA ROODE;PASUKUARU ARUFUREDO FUARUSHIGUNO;ZUIGURUTO HAAGEN
分类号 C08G73/10;G03F7/029;G03F7/031;G03F7/037;G03F7/038;G03F7/30;G03F7/40;H01L21/312;H05K3/28;(IPC1-7):G03F7/038 主分类号 C08G73/10
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