| 摘要 |
PURPOSE: To provide an M×N actuated mirror array for a light projecting system in which each actuator in the M×N actuated mirror array can be independently functioned by not short-circuiting the M×N actuated mirror array. CONSTITUTION: Each of an M×N opening 11 array is packed with metal 12, and each of M×N contact terminals 13 is positioned on each of the M×N openings packed with the metal. Each of M×N actuators 30 is provided with upper and lower faces and a pair of outside faces, and each is provided with a pair of electrodisplaysive members, a common signal electrode positioned between the pair of electrodisplaysive members, and a pair of reference electrodes on the pair of side faces of the actuator. Each of M×N mirrors is connected with each of the M×N actuators, and positioned on the upper face.
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