发明名称 Gate valve for vacuum processing system
摘要 A vacuum gate valve includes a valve body having an opening therethrough and a valve seat surrounding the opening, and a swing gate assembly rotatable about a pivot axis between an open position and a closed position. The swing gate assembly includes a swing gate body, a resilient seal gasket mounted to the swing gate body so as to sealingly engage the valve seat in the closed position, and a spreader for flattening the resilient seal gasket in a region that engages the valve seat. The gate valve further includes an actuator for rotating the swing gate assembly between the open position and the closed position. In a preferred embodiment, the seal gasket is a resilient tube, and the spreader is located within the tube. The swing gate assembly may include a mechanism for adjusting the spreader to thereby adjust the tension applied to the seal gasket.
申请公布号 US5379984(A) 申请公布日期 1995.01.10
申请号 US19940180205 申请日期 1994.01.11
申请人 INTEVAC, INC. 发明人 COAD, GEORGE L.;MATTHIAS, GEORGE
分类号 C23C14/00;F16K1/18;F16K51/02;(IPC1-7):F16K1/18 主分类号 C23C14/00
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