COPOLYMER OF SULFUR DIOXIDE AND NUCLEAR-SUBSTITED TRIALKYL-GERMYLSYRENE

摘要

The sulfur dioxide is added to a mixture of t-butyl hydroperoxide and p-trimethylgermyl styrene gained by Grignard reaction of p-bromostyrene and trimethylgermyl chloride as a dried liquid and is radically polymerized for 16 hr at -65 deg.C. After separating unreacted sulfur dioxide, a two component copolymer of p-trimethylgermyl styrene-sulfone is taked by crystallization. The unit of sulfur dioxide is 1-50 mole% and unit of nuclear substituted trimethylgermyl styrene is 50-99 mole% and weight average molecular weight is 500-10,000,000. The obtd. copolymer is useful as a material of positive resist.