发明名称 PRODUCTION OF HIGH PURITY PHOTOSENSITIVE RESIN COMPOSITION
摘要 PURPOSE:To decrease the amt. of metal impurities in a photosensitive resin compsn. without decreasing the sensitivity. CONSTITUTION:This photosensitive resin compsn. is prepared by dissolving a quinonediazide photosensitive compd. and an alkali-soluble resin in an org. solvent. In this production method, the quinonediazide photosensitive compd. and the alkali-soluble resin are dissolved in an org. solvent essentially comprising at least one of aliphatic ether esters, aliphatic ketone esters, aliphatic hydroxycarboxylates, aliphatic hydroxyketones, aliphatic ether ketones, and aliphatic ether alcohols. The obtd. soln is brought into contact with a gel-type strong acid anion exchange resin.
申请公布号 JPH075683(A) 申请公布日期 1995.01.10
申请号 JP19940025587 申请日期 1994.02.23
申请人 MITSUBISHI CHEM CORP 发明人 NISHI MINEO;NAKANO KOJI;MIYAZAKI AKIO
分类号 B01J39/04;G03F7/022;H01L21/027 主分类号 B01J39/04
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