| 摘要 |
PURPOSE:To easily know the irradiating position of a laser beam and to accurately perform the axis alignment of a light guide by installing a means for measuring a surface temperature distribution on the surface of a reflecting mirror which is provided with a plane for changing or converging a laser beam. CONSTITUTION:A plane mirror 10 is provided with a Cu-made base plate 10a whose surface is vapor-deposited with an Au coating layer 10b, the mirror is fixed on the opening side in a box-shaped holder 11 for the plane mirror, and the entire of rear side is cooled by a cooling air ejected from the air hole 11a provided on the plane mirror holder 11. An infrared camera 12 is attached to the bottom of the plane mirror holder 11, and the lens 12a and the two-dimensional CCD sensor 12b are arranged so that apt infrared image on the rear side of the plane mirror 10 is accurately formed by the lens 12 on the two-dimensional CCD sensor 12b of the camera 12. In addition, since the plane mirror 10, with its Cu base plate 10a vapor-deposited with the Au coating layer 10b, is superior in heat conductivity and there is little temp. difference between the front side and the rear side of the plane mirror, the temp. distribution on the front side is measured from the rear side without errors. |
