| 摘要 |
In a pressure sensor (1), a pressure force is transmitted, via a pressure plunger end (3) made of relatively hard material, to a measuring element (2) made of a sensor diaphragm (5) on a carrier (4), the sensor diaphragm (5) being part of a micromechanical arrangement made of silicon. According to the invention, there is applied to the sensor diaphragm (5) a metal structure (8) made of a metal of lower hardness compared with the hardness of the material of the pressure plunger end (3). This metal structure (8), at elevated pressure force, can be pressed on and plastically deformed by the bearing surface (9) of the pressure plunger end (3) in such a way that a positive contact on the bearing surface (9) is achieved and possible angle errors are equalised. <IMAGE>
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| 申请人 |
ROBERT BOSCH GMBH, 70469 STUTTGART, DE |
发明人 |
HERDEN, WERNER, DIPL.-ING. DR., 70839 GERLINGEN, DE;WEIBLEN, KURT, ING. (GRAD.), 72555 METZINGEN, DE;LIPPHARDT, UWE, DIPL.-PHYS. DR., 72770 REUTLINGEN, DE;MUENZEL, HORST, DIPL.-PHYS. DR., 72770 REUTLINGEN, DE;KUESELL, MATTHIAS, DIPL.-ING., 70806 KORNWESTHEIM, DE;SCHMIDT, STEFFEN, DIPL.-ING., 72770 REUTLINGEN, DE |
