发明名称 Thin film magnetic head with self-aligned pole tips
摘要 A magnetic head includes first and second pole tips separated by a nonmagnetic gap layer. The right side walls of the first and second pole tips are vertically aligned. Similarly, the left side walls of the first and second pole tips are vertically aligned. The side fringing flux is substantially reduced resulting in a magnetic head capable of writing data tracks with well defined boundaries. The fabrication of the magnetic head begins with forming a stack of layers on a substrate. The stack of layers includes a nonmagnetic layer sandwiched between the first pole tip layer and a sacrificial layer which is preferably made of a metal. A protective layer, such as alumina, is then deposited over and around the stack of layers. After planarization and ion milling, the sacrificial layer is exposed. The sacrificial layer is then etched away leaving a volume of space in the protective layer and above the gap layer. An inductive coil with associated dielectric layers are then deposited above the first pole layer. The second pole layer is thereafter deposited over the inductive coil and into the volume of space resulting in the first and second pole tips having vertically aligned side walls.
申请公布号 US6487040(B1) 申请公布日期 2002.11.26
申请号 US19990448459 申请日期 1999.11.24
申请人 READ-RITE CORPORATION 发明人 HSIAO YUN-LIN;WANG LIEN-CHANG;RAVIPATI DURGA I.;HINER HUGH C.;JENSEN WILLIAM D.
分类号 G11B5/31;(IPC1-7):G11B5/147 主分类号 G11B5/31
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