发明名称 Heat treatment method
摘要 In a method of minimizing the temperature difference on a large area plate in a sintering step of manufacturing a solar cell and using a cover for making the heat equal, a cover with the hole pitch and the hole location being set in it is used in an analysis to quantitatively determine the cover shape for realizing the equal-heat heating, whereby the heat equalizing operation of the plate can be realized.
申请公布号 US5379228(A) 申请公布日期 1995.01.03
申请号 US19920957790 申请日期 1992.10.08
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 MATSUDA, NAOKO;NAKA, HIROYUKI
分类号 H01L21/324;C03B29/00;H01L31/04;H01L31/18;(IPC1-7):G06F15/46 主分类号 H01L21/324
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