发明名称 |
Heat treatment method |
摘要 |
In a method of minimizing the temperature difference on a large area plate in a sintering step of manufacturing a solar cell and using a cover for making the heat equal, a cover with the hole pitch and the hole location being set in it is used in an analysis to quantitatively determine the cover shape for realizing the equal-heat heating, whereby the heat equalizing operation of the plate can be realized.
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申请公布号 |
US5379228(A) |
申请公布日期 |
1995.01.03 |
申请号 |
US19920957790 |
申请日期 |
1992.10.08 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
MATSUDA, NAOKO;NAKA, HIROYUKI |
分类号 |
H01L21/324;C03B29/00;H01L31/04;H01L31/18;(IPC1-7):G06F15/46 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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