发明名称 Crystal diameter measuring device
摘要 The growing portion of a single crystal 1 grown by the pull method is recorded and the image signal is output to a digitizing circuit 3 that converts the image signal into binary data. A memory device 4 stores the digitized images and the point P at the boundary between dark and light is detected by scanning the stored digitized images starting from the scanning-start pixel and proceeding in the direction parallel to the direction of single crystal pulling. The diameter D of the growing portion of the single crystal is determined based upon the boundary P, and the scanning-start pixel for the current operation is set at the pixel that is separated from the boundary Pb in the preceding operation by a preset number of pixels d in the opposite direction of the scan.
申请公布号 US5378900(A) 申请公布日期 1995.01.03
申请号 US19930158849 申请日期 1993.11.29
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 HIRANO, YOSHIHIRO;BABA, MASAHIKO
分类号 C30B15/26;C30B35/00;G01B11/08;G01B11/10;(IPC1-7):G01N21/86 主分类号 C30B15/26
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