发明名称 |
Crystal diameter measuring device |
摘要 |
The growing portion of a single crystal 1 grown by the pull method is recorded and the image signal is output to a digitizing circuit 3 that converts the image signal into binary data. A memory device 4 stores the digitized images and the point P at the boundary between dark and light is detected by scanning the stored digitized images starting from the scanning-start pixel and proceeding in the direction parallel to the direction of single crystal pulling. The diameter D of the growing portion of the single crystal is determined based upon the boundary P, and the scanning-start pixel for the current operation is set at the pixel that is separated from the boundary Pb in the preceding operation by a preset number of pixels d in the opposite direction of the scan.
|
申请公布号 |
US5378900(A) |
申请公布日期 |
1995.01.03 |
申请号 |
US19930158849 |
申请日期 |
1993.11.29 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
HIRANO, YOSHIHIRO;BABA, MASAHIKO |
分类号 |
C30B15/26;C30B35/00;G01B11/08;G01B11/10;(IPC1-7):G01N21/86 |
主分类号 |
C30B15/26 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|