Circulation housing for a mover

摘要

A mover ( 36 ) for an exposure apparatus ( 10 ) includes a conductor array ( 358 ) and a circulation housing ( 362 ) that defines at least a portion of a fluid passageway ( 364 ) near the conductor array ( 358 ). The circulation housing ( 362 ) includes a wall ( 366 A) having a wall thickness. In one embodiment, the wall thickness at a first position on the wall ( 366 A) is different than the wall thickness at a second position on the wall ( 366 A). The wall ( 366 A) can be curved and the shape of the curve is different at the first position than at the second position. Further, a cross-sectional shape of the wall ( 366 A) at the first position is different from a cross-sectional shape of the wall ( 366 A) at the second position.