| 摘要 |
<p>A method of controlling temperature inside a chamber according to a temperature profile which includes a plurality of segments, each of which has an increasing or decreasing temperature period and a subsequent constant temperature period. An operator only needs to inputting a target temperature, a first period, and a second period, one time each, as parameters, for each sub-input-state which is part of an input-state and which is provided for each segment, so that the temperature is varied to match the target temperature for the first period and that the target temperature is maintained for the second period, for each segment. <IMAGE></p> |
